Effect of thermal annealing on Si-H bonds and dangling bonds in amorphous silicon

  • Wai Keung Tam

Student thesis: Master's Thesis


Please refer to the "Abstract & TOC" file on the right side
Date of Award2006
Original languageEnglish
SupervisorPui Kong Lim (Supervisor)

User-Defined Keywords

  • Amorphous semiconductors
  • Rapid thermal processing
  • Silicon


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