A study on the composition and deposition mechanism of boron-silicon alloy films using ICP-AES, EDX and FT-IR techniques

  • Chun Lun Alan Leu

Student thesis: Master's Thesis

Abstract

Please refer to the "Abstract & TOC" file on the right side
Date of Award1991
Original languageEnglish

User-Defined Keywords

  • Silicon
  • Spectra

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Documents

  • Abstract & TOC

    File: application/pdf, 188 KB

    Type: Supplementary materials

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