WaferHSL: Wafer failure pattern classification with efficient human-like staged learning

Keyphrases

• Wafer 100%
• Human-like 100%
• Pattern Classification 100%
• Staged Learning 100%
• Failure Pattern 100%
• Unlabeled Samples 66%
• Labeled Sample 66%
• Unlabeled Data 33%
• Deep Learning Model 33%
• Training Set 33%
• Learning Framework 33%
• Learning Process 33%
• Integrated Circuits 33%
• Controller 33%
• Spatial Relationship 33%
• Geometric Properties 33%
• Limited Labeled Data 33%
• Multi-task Fusion 33%
• Manufacturing Stage 33%
• Semiconductor Product 33%
• Fusion Scheme 33%
• Knowledge Acquisition Process 33%
• Progressive Stages 33%

Computer Science

• Pattern Classification 100%
• Failure Pattern 100%
• Unlabeled Sample 66%
• Experimental Result 33%
• Learning Framework 33%
• Unlabeled Data 33%
• Deep Learning Model 33%
• Learning Process 33%
• Spatial Relationship 33%
• Acquisition Process 33%
• Knowledge Acquisition 33%
• Integrated Circuit 33%
• Limited Labeled Data 33%

Chemical Engineering

• Deep Learning Method 100%