Ultrafast Source Mask Optimization via Conditional Discrete Diffusion

  • Guojin Chen
  • , Zixiao Wang
  • , Bei Yu*
  • , David Z. Pan
  • , Martin D.F. Wong
  • *Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

11 Citations (Scopus)

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Computer Science

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Material Science