Triple patterning aware routing and its comparison with double patterning aware routing in 14nm technology

Qiang Ma*, Hongbo Zhang, Martin D.F. Wong

*Corresponding author for this work

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review

49 Citations (Scopus)


As technology continues to scale to 14nm node, Double Patterning Lithography (DPL) is pushed to near its limit. Triple Patterning Lithography (TPL) is a considerable and natural extension along the paradigm of DPL. With an extra mask to accommodate the features, TPL can be used to eliminate the unresolvable conflicts and minimize the number of stitches, which are pervasive in DPL process, and thus smoothen the layout decomposition step. Considering TPL during routing stage explores a larger solution space and can further improve the layout decomposability. In this paper, we propose the first triple patterning aware detailed routing scheme, and compare its performance with the double patterning version in 14nm node. Experimental results show that, using TPL, the conflicts can be resolved much more easily and the stitches can be significantly reduced in contrast to DPL.

Original languageEnglish
Title of host publication49th ACM/IEEE Design Automation Conference - Proceedings 2012
EditorsPatrick Groeneveld
PublisherAssociation for Computing Machinery (ACM)
Number of pages6
ISBN (Print)9781450311991
Publication statusPublished - 3 Jun 2012
Event49th ACM/IEEE Design Automation Conference, DAC 2012 - San Francisco, United States
Duration: 3 Jun 20127 Jun 2012

Publication series

NameACM/IEEE Design Automation Conference - Proceedings
ISSN (Print)0738-100X


Conference49th ACM/IEEE Design Automation Conference, DAC 2012
Country/TerritoryUnited States
CitySan Francisco
Internet address

Scopus Subject Areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Modelling and Simulation

User-Defined Keywords

  • 14nm technology
  • double patterning aware routing
  • maze routing
  • triple patterning aware routing


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