Theoretical studies of AlGaAs-GaAs multiple-quantum-well single-channel waveguide defined by ion-implantation-induced intermixing

Michael Hon Fai Chu, Wai Chee Shiu

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review


A simple and accurate model is presented for the analysis of ion-implanted AlGaAs-GaAs multiple-quantum-well (MQW) single channel waveguide. Our model proposed that the interdiffusion is vacancy enhanced. So we simulate the interdiffusion mechanism by solving the coupled diffusion equation of vacancy and interdiffusion numerically. The modal propagation constants full width half maximum (FWHM) and field profiles of the guided modes of the waveguide are solved numerically using a semi-vectorial wave equation. MQW optical waveguides defined by ion-implantation-induced intermixing are shown to have similar optical properties as conventional dielectric rib optical waveguide. They also provide a more flexible control over the waveguiding characteristics by changing parameters such as periods of MQW layers, mask width, ion implant energy, and diffusion time.
Original languageEnglish
Title of host publicationPhysics and Simulation of Optoelectronic Devices VIII
PublisherSociety of Photo-Optical Instrumentation Engineers
Number of pages15
Publication statusPublished - Jul 2000
EventSymposium On Integrated Optoelectronics - San Jose, CA, United States
Duration: 20 Jan 200026 Jan 2000

Publication series

NameProceedings SPIE
PublisherSociety of Photo-optical Instrumentation Engineers
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceSymposium On Integrated Optoelectronics

Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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