Study on the Interaction between the Laser-Ablated Aluminum Plume and the Nitrogen Discharge Plasma by Time- and Space-Resolved Spectroscopy

Pei Nan Wang, Qi Pan, Nai Ho CHEUNG, Shu Chi Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

Pulsed discharge of nitrogen was shown to be a very effective means to generate atomic nitrogen whose reactivity favored the synthesis of nitrides. In order to form aluminum nitride, such a plasma was allowed to interact with the plume generated by pulsed-laser ablation of aluminum. The plasma reaction was studied by time- and space-resolved optical emission spectroscopy. Emissions from ionic species of nitrogen (N+ and N2+) in the reaction region were observed. They were believed to be excited by the shock front generated by the pulsed-laser ablation. The delay time between ablation and discharge could be tuned to maximize the N emission. That condition also produced the purest aluminum nitride powders.

Original languageEnglish
Pages (from-to)205-209
Number of pages5
JournalApplied Spectroscopy
Volume53
Issue number2
DOIs
Publication statusPublished - Feb 1999

Scopus Subject Areas

  • Instrumentation
  • Spectroscopy

User-Defined Keywords

  • Aluminum nitride powders
  • Pulsed discharge of nitrogen
  • Pulsed laser ablation
  • Time- and space-resolved optical emission spectroscopy

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