Shuttle Mask Floorplanning

Gang Xu; Ruiqi Tian; D. F. Wong; Alfred Reich

doi:10.1117/12.517568

Shuttle Mask Floorplanning

Gang Xu, Ruiqi Tian, D. F. Wong, Alfred Reich

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Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

20 Citations (Scopus)

Abstract

A shuttle mask has different chips on the same mask. The chips are not electrically connected. Alliance and foundry customers can utilize shuttle masks to share the rising cost of mask and wafer manufacturing. This paper studies the shuttle mask floorplan problem, which is formulated as a rectangle-packing problem with constraints of final die sawing strategy and die-to-die mask inspection. For our formulation, we offer a "merging" method that reduces the problem to an unconstrained slicing floorplan problem. Excellent results are obtained from the experiment with real industry data. We also study a "general" method and discuss the reason why it does not work very well.

Original language	English
Title of host publication	23rd Annual BACUS Symposium on Photomask Technology
Editors	Kurt R. Kimmel, Wolfgang Staud
Publisher	SPIE
Pages	185-194
Number of pages	10
DOIs	https://doi.org/10.1117/12.517568
Publication status	Published - Sept 2003
Event	23rd Annual BACUS Symposium on Photomask Technology - Monterey, United States Duration: 9 Sept 2003 → 12 Sept 2003 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5256.toc

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	5256
ISSN (Print)	0277-786X

Conference

Conference	23rd Annual BACUS Symposium on Photomask Technology
Country/Territory	United States
City	Monterey
Period	9/09/03 → 12/09/03
Internet address	https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5256.toc

User-Defined Keywords

Floorplanning
Merging method
Shuttle mask
Simulated annealing

Access to Document

10.1117/12.517568

Cite this

@inproceedings{faa66be7802d4c5b864d4d34317423a6,

title = "Shuttle Mask Floorplanning",

abstract = "A shuttle mask has different chips on the same mask. The chips are not electrically connected. Alliance and foundry customers can utilize shuttle masks to share the rising cost of mask and wafer manufacturing. This paper studies the shuttle mask floorplan problem, which is formulated as a rectangle-packing problem with constraints of final die sawing strategy and die-to-die mask inspection. For our formulation, we offer a {"}merging{"} method that reduces the problem to an unconstrained slicing floorplan problem. Excellent results are obtained from the experiment with real industry data. We also study a {"}general{"} method and discuss the reason why it does not work very well.",

keywords = "Floorplanning, Merging method, Shuttle mask, Simulated annealing",

author = "Gang Xu and Ruiqi Tian and Wong, {D. F.} and Alfred Reich",

year = "2003",

month = sep,

doi = "10.1117/12.517568",

language = "English",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

pages = "185--194",

editor = "Kimmel, {Kurt R.} and Wolfgang Staud",

booktitle = "23rd Annual BACUS Symposium on Photomask Technology",

address = "United States",

note = "23rd Annual BACUS Symposium on Photomask Technology ; Conference date: 09-09-2003 Through 12-09-2003",

url = "https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5256.toc",

}

Xu, G, Tian, R, Wong, DF & Reich, A 2003, Shuttle Mask Floorplanning. in KR Kimmel & W Staud (eds), 23rd Annual BACUS Symposium on Photomask Technology. Proceedings of SPIE - The International Society for Optical Engineering, vol. 5256, SPIE, pp. 185-194, 23rd Annual BACUS Symposium on Photomask Technology, Monterey, California, United States, 9/09/03. https://doi.org/10.1117/12.517568

Shuttle Mask Floorplanning. / Xu, Gang; Tian, Ruiqi; Wong, D. F. et al.
23rd Annual BACUS Symposium on Photomask Technology. ed. / Kurt R. Kimmel; Wolfgang Staud. SPIE, 2003. p. 185-194 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 5256).

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

TY - GEN

T1 - Shuttle Mask Floorplanning

AU - Xu, Gang

AU - Tian, Ruiqi

AU - Wong, D. F.

AU - Reich, Alfred

PY - 2003/9

Y1 - 2003/9

N2 - A shuttle mask has different chips on the same mask. The chips are not electrically connected. Alliance and foundry customers can utilize shuttle masks to share the rising cost of mask and wafer manufacturing. This paper studies the shuttle mask floorplan problem, which is formulated as a rectangle-packing problem with constraints of final die sawing strategy and die-to-die mask inspection. For our formulation, we offer a "merging" method that reduces the problem to an unconstrained slicing floorplan problem. Excellent results are obtained from the experiment with real industry data. We also study a "general" method and discuss the reason why it does not work very well.

AB - A shuttle mask has different chips on the same mask. The chips are not electrically connected. Alliance and foundry customers can utilize shuttle masks to share the rising cost of mask and wafer manufacturing. This paper studies the shuttle mask floorplan problem, which is formulated as a rectangle-packing problem with constraints of final die sawing strategy and die-to-die mask inspection. For our formulation, we offer a "merging" method that reduces the problem to an unconstrained slicing floorplan problem. Excellent results are obtained from the experiment with real industry data. We also study a "general" method and discuss the reason why it does not work very well.

KW - Floorplanning

KW - Merging method

KW - Shuttle mask

KW - Simulated annealing

UR - http://www.scopus.com/inward/record.url?scp=1842475791&partnerID=8YFLogxK

U2 - 10.1117/12.517568

DO - 10.1117/12.517568

M3 - Conference proceeding

AN - SCOPUS:1842475791

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 185

EP - 194

BT - 23rd Annual BACUS Symposium on Photomask Technology

A2 - Kimmel, Kurt R.

A2 - Staud, Wolfgang

PB - SPIE

T2 - 23rd Annual BACUS Symposium on Photomask Technology

Y2 - 9 September 2003 through 12 September 2003

ER -

Shuttle Mask Floorplanning

Abstract

Publication series

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User-Defined Keywords

Access to Document

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