Abstract
Simultaneous measurements by two techniques for in situ laser-induced damage threshold (LIDT) detection, based on optical diffraction and acoustic measurements, were demonstrated. Pulsed Nd:YAG laser (532 nm) ablation of 25-nm-thick aluminum films on quartz was studied as a test case. The two probes gave consistent LIDT values, and were sensitive and simple to operate. For above-threshold ablation, the diffraction and acoustic signals were found to be strongly correlated, rendering them useful not just for threshold detection, but for studying ablation dynamics as well.
| Original language | English |
|---|---|
| Pages (from-to) | 1606-1610 |
| Number of pages | 5 |
| Journal | Review of Scientific Instruments |
| Volume | 64 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1993 |