Pulsed laser-induced damage threshold studies of thin aluminum films on quartz: Simultaneous monitoring of optical and acoustic signals

Yau Ming Lai*, Nai Ho CHEUNG

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

Simultaneous measurements by two techniques for in situ laser-induced damage threshold (LIDT) detection, based on optical diffraction and acoustic measurements, were demonstrated. Pulsed Nd:YAG laser (532 nm) ablation of 25-nm-thick aluminum films on quartz was studied as a test case. The two probes gave consistent LIDT values, and were sensitive and simple to operate. For above-threshold ablation, the diffraction and acoustic signals were found to be strongly correlated, rendering them useful not just for threshold detection, but for studying ablation dynamics as well.

Original languageEnglish
Pages (from-to)1606-1610
Number of pages5
JournalReview of Scientific Instruments
Volume64
Issue number6
DOIs
Publication statusPublished - 1993

Scopus Subject Areas

  • Instrumentation

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