Pulsed-discharge-aided laser ablation synthesis of nanoscale aluminum nitride powders

P. N. Wang*, Q. Pan, Nai Ho CHEUNG, S. C. Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)

Abstract

Pulsed nitrogen (N2) discharges were shown to efficiently generate atomic nitrogen that promoted the synthesis of high-purity aluminum nitride powders formed by pulsed-laser ablation of aluminum targets. The interaction between the nitrogen discharge plasma and the ablated aluminum plume depended on the synchronisation of the two pulsed events for maximum overlap of the transient reactants. By monitoring the optical emissions of the reactive N+ species and analysing the synthesised powder with X-ray photoelectron spectroscopy, it was found that when laser ablation occurred at about 3 μs after the pulsed discharge, the N+ emission from the overlapping plasma was the most intense and the purity of the aluminum nitride synthesized was the highest.

Original languageEnglish
Pages (from-to)233-236
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume67
Issue number2
DOIs
Publication statusPublished - 1998

Scopus Subject Areas

  • Chemistry(all)
  • Materials Science(all)

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