Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

Caiqin Han; Dexian Ye; Yiping Zhao; Junxue FU

doi:10.1116/1.5026581

Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

Caiqin Han, Dexian Ye^*, Yiping Zhao, Junxue FU

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Journal article › peer-review

6 Citations (Scopus)

Abstract

The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.

Original language	English
Article number	051802
Journal	Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Volume	36
Issue number	5
DOIs	https://doi.org/10.1116/1.5026581
Publication status	Published - 1 Sept 2018

Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Process Chemistry and Technology
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

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title = "Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects",

abstract = "The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.",

author = "Caiqin Han and Dexian Ye and Yiping Zhao and Junxue FU",

note = "Funding Information: This work was supported by the National Science Foundation (Grant No. ECCS-1029609). C.H. and Y.Z. were supported in part by the National Natural Science Foundation of China (Grant No. 61575087), the Natural Science Foundation of Jiangsu Province (Grant No. BK20151164), the Foundation of Xuzhou City (No. KC15MS029), and the Priority Academic Program Development of Jiangsu Higher Education Institutions. D.Y. was supported partially by the National Science Foundation (Grant No. CHE-1337700).",

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doi = "10.1116/1.5026581",

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journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",

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TY - JOUR

T1 - Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

AU - Han, Caiqin

AU - Ye, Dexian

AU - Zhao, Yiping

AU - FU, Junxue

N1 - Funding Information: This work was supported by the National Science Foundation (Grant No. ECCS-1029609). C.H. and Y.Z. were supported in part by the National Natural Science Foundation of China (Grant No. 61575087), the Natural Science Foundation of Jiangsu Province (Grant No. BK20151164), the Foundation of Xuzhou City (No. KC15MS029), and the Priority Academic Program Development of Jiangsu Higher Education Institutions. D.Y. was supported partially by the National Science Foundation (Grant No. CHE-1337700).

PY - 2018/9/1

Y1 - 2018/9/1

N2 - The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.

AB - The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.

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U2 - 10.1116/1.5026581

DO - 10.1116/1.5026581

M3 - Journal article

AN - SCOPUS:85052829723

SN - 2166-2746

VL - 36

JO - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

JF - Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

IS - 5

M1 - 051802

ER -

Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

Abstract

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