@article{755f7eacb4c142058e7b55a12d7385c6,
title = "Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects",
abstract = "The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.",
author = "Caiqin Han and Dexian Ye and Yiping Zhao and Junxue Fu",
note = "Funding Information: This work was supported by the National Science Foundation (Grant No. ECCS-1029609). C.H. and Y.Z. were supported in part by the National Natural Science Foundation of China (Grant No. 61575087), the Natural Science Foundation of Jiangsu Province (Grant No. BK20151164), the Foundation of Xuzhou City (No. KC15MS029), and the Priority Academic Program Development of Jiangsu Higher Education Institutions. D.Y. was supported partially by the National Science Foundation (Grant No. CHE-1337700).",
year = "2018",
month = sep,
day = "1",
doi = "10.1116/1.5026581",
language = "English",
volume = "36",
journal = "Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics",
issn = "2166-2746",
publisher = "AVS Science and Technology Society",
number = "5",
}