Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

Caiqin Han, Dexian Ye*, Yiping Zhao, Junxue FU

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

6 Citations (Scopus)


The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d < 500 nm, while vertical Ag-nanorod-like nanostructures are produced when d > 500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.

Original languageEnglish
Article number051802
JournalJournal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Issue number5
Publication statusPublished - 1 Sept 2018

Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry


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