Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao; Jushuai Wu; A. Ping Zhang; Hwa-Yaw Tam; Alex Wai

doi:10.1109/JSEN.2017.2737551

Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Mian Yao
, Jushuai Wu
, A. Ping Zhang^*
, Hwa-Yaw Tam
, Alex Wai

^*Corresponding author for this work

Research output: Contribution to journal › Journal article › peer-review

10 Citations (Scopus)

Abstract

We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

Original language	English
Pages (from-to)	7257-7261
Number of pages	5
Journal	IEEE Sensors Journal
Volume	17
Issue number	22
DOIs	https://doi.org/10.1109/JSEN.2017.2737551
Publication status	Published - 15 Nov 2017

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

User-Defined Keywords

Optical microfabrication
suspended-mirror device
3D printed sensor

Access to Document

10.1109/JSEN.2017.2737551

Cite this

@article{2c6481a33be94ab496bc0e22403019e2,

title = "Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices",

abstract = "We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.",

keywords = "Optical microfabrication, suspended-mirror device, 3D printed sensor",

author = "Mian Yao and Jushuai Wu and Zhang, \{A. Ping\} and Hwa-Yaw Tam and Alex Wai",

note = "Funding Information: Manuscript received March 11, 2017; revised July 18, 2017; accepted July 27, 2017. Date of publication August 8, 2017; date of current version October 24, 2017. This work was supported in part by the PolyU Strategic Development Special Project under Grant 1-ZVGB and in part by the Departmental General Research Fund under Grant 4-ZZBE. The associate editor coordinating the review of this paper and approving it for publication was Dr. Marco Petrovich. (Corresponding author: A. Ping Zhang.) M. Yao is with the Department of Electrical Engineering and with the Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong. Publisher Copyright: {\textcopyright} 2017 IEEE.",

year = "2017",

month = nov,

day = "15",

doi = "10.1109/JSEN.2017.2737551",

language = "English",

volume = "17",

pages = "7257--7261",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "IEEE",

number = "22",

}

TY - JOUR

T1 - Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

AU - Yao, Mian

AU - Wu, Jushuai

AU - Zhang, A. Ping

AU - Tam, Hwa-Yaw

AU - Wai, Alex

N1 - Funding Information: Manuscript received March 11, 2017; revised July 18, 2017; accepted July 27, 2017. Date of publication August 8, 2017; date of current version October 24, 2017. This work was supported in part by the PolyU Strategic Development Special Project under Grant 1-ZVGB and in part by the Departmental General Research Fund under Grant 4-ZZBE. The associate editor coordinating the review of this paper and approving it for publication was Dr. Marco Petrovich. (Corresponding author: A. Ping Zhang.) M. Yao is with the Department of Electrical Engineering and with the Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong. Publisher Copyright: © 2017 IEEE.

PY - 2017/11/15

Y1 - 2017/11/15

N2 - We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

AB - We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.

KW - Optical microfabrication

KW - suspended-mirror device

KW - 3D printed sensor

UR - https://www.scopus.com/pages/publications/85029009339

U2 - 10.1109/JSEN.2017.2737551

DO - 10.1109/JSEN.2017.2737551

M3 - Journal article

AN - SCOPUS:85029009339

SN - 1530-437X

VL - 17

SP - 7257

EP - 7261

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 22

ER -

Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices

Abstract

UN SDGs

User-Defined Keywords

Access to Document

Other files and links

Fingerprint

Cite this