@article{2c6481a33be94ab496bc0e22403019e2,
title = "Optically 3-D μ-Printed Ferrule-Top Polymer Suspended-Mirror Devices",
abstract = "We present a novel optical microfabrication technology to directly print polymer suspended-mirror devices (SMDs) on the end face of fiber-optic ferrules. With an own-established optical 3-D μ-printing platform, three kinds of ferrule-top SMDs were rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SMDs were measured and then analyzed by using fast Fourier transform. The application of the ferrule-top SMD as a miniature displacement sensor was experimentally demonstrated.",
keywords = "Optical microfabrication, suspended-mirror device, 3D printed sensor",
author = "Mian Yao and Jushuai Wu and Zhang, {A. Ping} and Hwa-Yaw Tam and Alex Wai",
note = "Funding Information: Manuscript received March 11, 2017; revised July 18, 2017; accepted July 27, 2017. Date of publication August 8, 2017; date of current version October 24, 2017. This work was supported in part by the PolyU Strategic Development Special Project under Grant 1-ZVGB and in part by the Departmental General Research Fund under Grant 4-ZZBE. The associate editor coordinating the review of this paper and approving it for publication was Dr. Marco Petrovich. (Corresponding author: A. Ping Zhang.) M. Yao is with the Department of Electrical Engineering and with the Department of Electronic and Information Engineering, The Hong Kong Polytechnic University, Kowloon, Hong Kong. Publisher Copyright: {\textcopyright} 2017 IEEE.",
year = "2017",
month = nov,
day = "15",
doi = "10.1109/JSEN.2017.2737551",
language = "English",
volume = "17",
pages = "7257--7261",
journal = "IEEE Sensors Journal",
issn = "1530-437X",
publisher = "IEEE",
number = "22",
}
