TY - JOUR
T1 - Optical Fiber-Tip Fabry-Pérot Interferometric Pressure Sensor Based on an In Situ μ-Printed Air Cavity
AU - Wu, Jushuai
AU - Yao, Mian
AU - Xiong, Feng
AU - Zhang, A. Ping
AU - Tam, Hwa-Yaw
AU - Wai, Alex
N1 - Funding Information:
Manuscript received March 10, 2018; revised May 10, 2018; accepted May 31, 2018. Date of publication June 4, 2018; date of current version July 12, 2018. This work was supported in part by the PolyU Strategic Development Special Project under Grant 1-ZVGB and in part by the PolyU General Research Fund under Grant G-YBY2. (Corresponding author: A. Ping Zhang.) J. Wu, M. Yao, F. Xiong, A. P. Zhang, and H.-Y. Tam are with the Photonics Research Center, Department of Electrical Engineering, The Hong Kong Polytechnic University, Hong Kong, China (e-mail:,[email protected]; [email protected]; [email protected]; azhang@ polyu.edu.hk; [email protected]).
Publisher Copyright:
© 1983-2012 IEEE.
PY - 2018/9
Y1 - 2018/9
N2 - In this paper, we present a miniature fiber-optic Fabry-Pérot interferometric pressure sensor based on an in situ printed fiber-top air cavity. With an in-house optical 3D μ-printing setup, a suspended SU-8 diaphragm with light scatter is directly printed on the end face of standard optical fiber to form a sealed Fabry-Pérot cavity. The fabricated Fabry-Pérot microinterferometer shows a linear response to the change of pressure with a sensitivity of 2.93 nm/MPa in the range of 0 ∼ 700 kPa. The response of the sensor to the change of temperature in the range from 30 °C to 65 °C is measured to be ∼38 pm/°C. Such an ultra-small fiber-optic pressure sensor has remote monitoring capability and is promising for a great number of measurement and testing applications ranging from miniature manometers to bioprobes.
AB - In this paper, we present a miniature fiber-optic Fabry-Pérot interferometric pressure sensor based on an in situ printed fiber-top air cavity. With an in-house optical 3D μ-printing setup, a suspended SU-8 diaphragm with light scatter is directly printed on the end face of standard optical fiber to form a sealed Fabry-Pérot cavity. The fabricated Fabry-Pérot microinterferometer shows a linear response to the change of pressure with a sensitivity of 2.93 nm/MPa in the range of 0 ∼ 700 kPa. The response of the sensor to the change of temperature in the range from 30 °C to 65 °C is measured to be ∼38 pm/°C. Such an ultra-small fiber-optic pressure sensor has remote monitoring capability and is promising for a great number of measurement and testing applications ranging from miniature manometers to bioprobes.
KW - Optical fiber sensors
KW - Fabry–Pérot cavity
KW - optical 3D μ-printing
KW - pressure sensor
UR - http://www.scopus.com/inward/record.url?scp=85047970550&partnerID=8YFLogxK
U2 - 10.1109/JLT.2018.2843885
DO - 10.1109/JLT.2018.2843885
M3 - Journal article
AN - SCOPUS:85047970550
SN - 0733-8724
VL - 36
SP - 3618
EP - 3623
JO - Journal of Lightwave Technology
JF - Journal of Lightwave Technology
IS - 17
ER -