Optical Fiber-Tip Fabry-Pérot Interferometric Pressure Sensor Based on an In Situ μ-Printed Air Cavity

Jushuai Wu, Mian Yao, Feng Xiong, A. Ping Zhang*, Hwa-Yaw Tam, Alex Wai

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

36 Citations (Scopus)

Abstract

In this paper, we present a miniature fiber-optic Fabry-Pérot interferometric pressure sensor based on an in situ printed fiber-top air cavity. With an in-house optical 3D μ-printing setup, a suspended SU-8 diaphragm with light scatter is directly printed on the end face of standard optical fiber to form a sealed Fabry-Pérot cavity. The fabricated Fabry-Pérot microinterferometer shows a linear response to the change of pressure with a sensitivity of 2.93 nm/MPa in the range of 0 ∼ 700 kPa. The response of the sensor to the change of temperature in the range from 30 °C to 65 °C is measured to be ∼38 pm/°C. Such an ultra-small fiber-optic pressure sensor has remote monitoring capability and is promising for a great number of measurement and testing applications ranging from miniature manometers to bioprobes.

Original languageEnglish
Pages (from-to)3618-3623
Number of pages6
JournalJournal of Lightwave Technology
Volume36
Issue number17
Early online date4 Jun 2018
DOIs
Publication statusPublished - Sept 2018

Scopus Subject Areas

  • Atomic and Molecular Physics, and Optics

User-Defined Keywords

  • Optical fiber sensors
  • Fabry–Pérot cavity
  • optical 3D μ-printing
  • pressure sensor

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