Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices

Mian Yao; P. K.A. Wai; Jushuai Wu; A. Ping Zhang; Hwa Yaw Tam

doi:10.1109/ICSENS.2016.7808491

Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices

Mian Yao
, P. K.A. Wai^*
, Jushuai Wu
, A. Ping Zhang^*
, Hwa Yaw Tam

^*Corresponding author for this work

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

2 Citations (Scopus)

Abstract

We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.

Original language	English
Title of host publication	IEEE Sensors, SENSORS 2016 - Proceedings
Place of Publication	Piscataway
Publisher	IEEE
Number of pages	3
ISBN (Electronic)	9781479982875
ISBN (Print)	9781479982882
DOIs	https://doi.org/10.1109/ICSENS.2016.7808491
Publication status	Published - 30 Oct 2016
Event	15th IEEE Sensors Conference - Caribe Royale All-Suite Hotel and Convention Center, Orlando, United States Duration: 30 Oct 2016 → 2 Nov 2016 https://ieeexplore.ieee.org/xpl/conhome/7777313/proceeding (Conference proceeding) https://ieee-sensors2016.org/ (Conference website)

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	15th IEEE Sensors Conference
Abbreviated title	SENSORS 2016
Country/Territory	United States
City	Orlando
Period	30/10/16 → 2/11/16
Internet address	https://ieeexplore.ieee.org/xpl/conhome/7777313/proceeding (Conference proceeding) https://ieee-sensors2016.org/ (Conference website)

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

User-Defined Keywords

3D printed sensor
optical microfabrication
suspended-mirror device

Access to Document

10.1109/ICSENS.2016.7808491

Cite this

@inproceedings{a4746877d6444d598db2469fa4ae102c,

title = "Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices",

abstract = "We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.",

keywords = "3D printed sensor, optical microfabrication, suspended-mirror device",

author = "Mian Yao and Wai, \{P. K.A.\} and Jushuai Wu and Zhang, \{A. Ping\} and Tam, \{Hwa Yaw\}",

note = "This work was partially supported by PolyU Strategic Development Special Project (Grant No.: l-ZVGB). Publisher Copyright: {\textcopyright} 2016 IEEE.; 15th IEEE Sensors Conference, SENSORS 2016 ; Conference date: 30-10-2016 Through 02-11-2016",

year = "2016",

month = oct,

day = "30",

doi = "10.1109/ICSENS.2016.7808491",

language = "English",

isbn = "9781479982882",

series = "Proceedings of IEEE Sensors",

publisher = "IEEE",

booktitle = "IEEE Sensors, SENSORS 2016 - Proceedings",

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TY - GEN

T1 - Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices

AU - Yao, Mian

AU - Wai, P. K.A.

AU - Wu, Jushuai

AU - Zhang, A. Ping

AU - Tam, Hwa Yaw

PY - 2016/10/30

Y1 - 2016/10/30

N2 - We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.

AB - We present a novel optical printing technology for rapid fabrication of polymer suspended-mirror devices (SMDs) on the end surface of a ferrule of optical fiber connector. With the own-developed 3D μ-printing technology, three kinds of ferrule-top SMDs have been rapidly fabricated by using SU-8 photoresist. Optical reflection spectra of the fabricated SU-8 SMDs are measured. The application of SMDs as a highly sensitive displacement sensor is experimentally demonstrated.

KW - 3D printed sensor

KW - optical microfabrication

KW - suspended-mirror device

UR - https://www.scopus.com/pages/publications/85010992203

UR - https://ieeexplore.ieee.org/document/7808491/authors#authors

U2 - 10.1109/ICSENS.2016.7808491

DO - 10.1109/ICSENS.2016.7808491

M3 - Conference proceeding

AN - SCOPUS:85010992203

SN - 9781479982882

T3 - Proceedings of IEEE Sensors

BT - IEEE Sensors, SENSORS 2016 - Proceedings

PB - IEEE

CY - Piscataway

T2 - 15th IEEE Sensors Conference

Y2 - 30 October 2016 through 2 November 2016

ER -

Optical 3D μ-printing of ferrule-top polymer suspended-mirror devices

Abstract

Publication series

Conference

UN SDGs

User-Defined Keywords

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