OpenILT: An Open Source Inverse Lithography Technique Framework: An Open Source Inverse Lithography Technique Framework (Invited Paper)

  • Su Zheng*
  • , Bei Yu
  • , Martin Wong
    • *Corresponding author for this work

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

16 Citations (Scopus)

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Computer Science

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Engineering

Material Science