OpenILT: An Open Source Inverse Lithography Technique Framework: An Open Source Inverse Lithography Technique Framework (Invited Paper)

Su Zheng*, Bei Yu, Martin Wong

*Corresponding author for this work

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review

5 Citations (Scopus)

Abstract

Semiconductor lithography is a key process for fabricating integrated circuits, but it suffers from various distortions and variations that affect the quality of the printed patterns. Optical proximity correction (OPC) is a technique to improve pattern fidelity and robustness, and inverse lithography technique (ILT) is a promising OPC method that optimizes the mask as an inverse problem of the imaging system. However, ILT is computationally expensive and challenging to implement at a full-chip scale. In this paper, we present OpenILT, an open-source ILT platform that supports the rapid development and evaluation of GPU-accelerated and AI-driven ILT methods. OpenILT provides a modular and flexible framework that integrates various ILT components, such as lithography simulation, objective functions, and evaluation metrics. It also offers a convenient interface to PyTorch, a popular deep learning library, to enable the implementation of GPU-accelerated and AI-driven ILT methods.

Original languageEnglish
Title of host publicationProceedings of 2023 IEEE 15th International Conference on ASIC, ASICON 2023
EditorsFan Ye, Ting-Ao Tang
PublisherIEEE
Number of pages4
ISBN (Electronic)9798350312980
ISBN (Print)9798350312997
DOIs
Publication statusPublished - Oct 2023
Event15th IEEE International Conference on ASIC, ASICON 2023 - Nanjing, China
Duration: 24 Oct 202327 Oct 2023
https://ieeexplore.ieee.org/xpl/conhome/10395907/proceeding

Publication series

NameProceedings of International Conference on ASIC
ISSN (Print)2162-7541
ISSN (Electronic)2162-755X

Conference

Conference15th IEEE International Conference on ASIC, ASICON 2023
Country/TerritoryChina
CityNanjing
Period24/10/2327/10/23
Internet address

Scopus Subject Areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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