Abstract
Multilayer superlens has been reported that it had advantages over the single metal layer superlens. In this work, single silver layer and Ag-SiO 2 multilayer superlens devices working at wavelength of 365 nm were fabricated using standard photolithography method. Grating objects with line/space (190 nm/190 nm) resolution could be resolved through both kinds of lens structures with working distance up to 128 nm. However, Ag-SiO 2 multilayer lens shows higher transmittance and image contrast than the single silver layer device, the experimental result proves the theoretical calculation.
| Original language | English |
|---|---|
| Pages (from-to) | 10725-10728 |
| Number of pages | 4 |
| Journal | Journal of Nanoscience and Nanotechnology |
| Volume | 11 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - 2011 |
User-Defined Keywords
- Imaging
- Near field
- Subwavelength
- Superlens