Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

H. Gong; J.Q. Hu; J.H. Wang; C.H. Ong; F.R. Zhu

doi:10.1016/j.snb.2005.09.008

Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

H. Gong^*
, J.Q. Hu
, J.H. Wang
, C.H. Ong
, F.R. Zhu

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Journal article › peer-review

479 Citations (Scopus)

Abstract

A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

Original language	English
Pages (from-to)	247-251
Number of pages	5
Journal	Sensors and Actuators B: Chemical
Volume	115
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2005.09.008
Publication status	Published - 23 May 2006

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CO
Gas sensor
Nano-crystalline Cu-doped ZnO

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10.1016/j.snb.2005.09.008

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title = "Nano-crystalline Cu-doped ZnO thin film gas sensor for CO",

abstract = "A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.",

keywords = "CO, Gas sensor, Nano-crystalline Cu-doped ZnO",

author = "H. Gong and J.Q. Hu and J.H. Wang and C.H. Ong and F.R. Zhu",

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T1 - Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

AU - Gong, H.

AU - Hu, J.Q.

AU - Wang, J.H.

AU - Ong, C.H.

AU - Zhu, F.R.

PY - 2006/5/23

Y1 - 2006/5/23

N2 - A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

AB - A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

KW - CO

KW - Gas sensor

KW - Nano-crystalline Cu-doped ZnO

UR - https://www.scopus.com/pages/publications/33645748054

U2 - 10.1016/j.snb.2005.09.008

DO - 10.1016/j.snb.2005.09.008

M3 - Journal article

AN - SCOPUS:33645748054

SN - 0925-4005

VL - 115

SP - 247

EP - 251

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 1

ER -

Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

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