Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

H. Gong*, J.Q. Hu, J.H. Wang, C.H. Ong, F.R. Zhu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

420 Citations (Scopus)

Abstract

A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

Original languageEnglish
Pages (from-to)247-251
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume115
Issue number1
DOIs
Publication statusPublished - 23 May 2006
Externally publishedYes

Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

User-Defined Keywords

  • CO
  • Gas sensor
  • Nano-crystalline Cu-doped ZnO

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