Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

H. Gong; J.Q. Hu; J.H. Wang; C.H. Ong; F.R. Zhu

doi:10.1016/j.snb.2005.09.008

Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

H. Gong^*, J.Q. Hu, J.H. Wang, C.H. Ong, F.R. Zhu

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Journal article › peer-review

461 Citations (Scopus)

Abstract

A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

Original language	English
Pages (from-to)	247-251
Number of pages	5
Journal	Sensors and Actuators B: Chemical
Volume	115
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2005.09.008
Publication status	Published - 23 May 2006

Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

User-Defined Keywords

CO
Gas sensor
Nano-crystalline Cu-doped ZnO

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abstract = "A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.",

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T1 - Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

AU - Gong, H.

AU - Hu, J.Q.

AU - Wang, J.H.

AU - Ong, C.H.

AU - Zhu, F.R.

PY - 2006/5/23

Y1 - 2006/5/23

N2 - A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

AB - A Cu-doped ZnO (CZO) film was prepared on a glass substrate by co-sputtering using ZnO and Cu targets. The CZO film possessed a columnar structure consisting of small crystals with an average grain size of around 5 nm. The CO-sensing properties of the CZO film were tested at operating temperatures of 150, 300, 350 and 400 °C. It was found that CZO-based sensor exhibited the highest sensitivity to CO at 350 °C. An obvious change in resistance of the CZO film was also observed when the sensor was exposed to 6 ppm CO at 150 °C. The sensing mechanism of the nano-structured CZO sensor is discussed.

KW - CO

KW - Gas sensor

KW - Nano-crystalline Cu-doped ZnO

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SN - 0925-4005

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JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

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Nano-crystalline Cu-doped ZnO thin film gas sensor for CO

Abstract

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