Abstract
We demonstrate monolithic integration of fine cylindrical glass microcapillaries (diameter ~1 μm) on silicon and evaluate their performance for electrophoretic separation of biomolecules. Such microcapillaries are achieved through thermal reflow of a glass layer on microstructured silicon whereby slender voids are moulded into cylindrical tubes. The process allows self-enclosed microcapillaries with a uniform profile. A simplified method is also described to integrate the microcapillaries with a sample-injection cross without the requirement of glass etching. The 10-mm-long microcapillaries sustain field intensities up to 90 kV/m and limit the temperature excursions due to Joule heating to a few degrees Celsius only.
Original language | English |
---|---|
Article number | 036501 |
Journal | Biomicrofluidics |
Volume | 6 |
Issue number | 3 |
DOIs | |
Publication status | Published - 18 Jul 2012 |
Scopus Subject Areas
- Molecular Biology
- Materials Science(all)
- Genetics
- Condensed Matter Physics
- Physical and Theoretical Chemistry