Monolithic integration of fine cylindrical glass microcapillaries on silicon for electrophoretic separation of biomolecules

Zhen Cao, Kangning REN, Hongkai Wu, Levent Yobas*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

We demonstrate monolithic integration of fine cylindrical glass microcapillaries (diameter ~1 μm) on silicon and evaluate their performance for electrophoretic separation of biomolecules. Such microcapillaries are achieved through thermal reflow of a glass layer on microstructured silicon whereby slender voids are moulded into cylindrical tubes. The process allows self-enclosed microcapillaries with a uniform profile. A simplified method is also described to integrate the microcapillaries with a sample-injection cross without the requirement of glass etching. The 10-mm-long microcapillaries sustain field intensities up to 90 kV/m and limit the temperature excursions due to Joule heating to a few degrees Celsius only.

Original languageEnglish
Article number036501
JournalBiomicrofluidics
Volume6
Issue number3
DOIs
Publication statusPublished - 18 Jul 2012

Scopus Subject Areas

  • Molecular Biology
  • Materials Science(all)
  • Genetics
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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