Model-based multiple patterning layout decomposition

Daifeng Guo*, Haitong Tian, Yuelin Du, Martin D.F. Wong

*Corresponding author for this work

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Model-based multiple patterning layout decomposition'. Together they form a unique fingerprint.

Mathematics

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds