Model-based dummy feature placement for oxide chemical-mechanical polishing manufacturability

Keyphrases

• Oxides 100%
• Manufacturability 100%
• Chemical Mechanical Polishing 100%
• Multiple Layers 50%
• Planarization 50%
• Pattern Density 50%
• Angstrom 33%
• Local Patterns 33%
• In(III) 16%
• Design Information 16%
• Placement Problem 16%
• Two-step Procedure 16%
• Cumulative Effects 16%
• Local Spatial Pattern 16%
• Rule-based Approach 16%
• Deep Submicron 16%
• Topographic Variation 16%
• Global Density 16%

Engineering

• Manufacturability 100%
• Chemical Mechanical Polishing 100%
• Planarization 50%
• Conducted Experiment 16%
• Step Procedure 16%
• Previously Published Work 16%
• Design Data 16%