@inbook{89b496710e6345338d7e4fe74dc5beca,
title = "Layout Decomposition for Multiple Patterning",
keywords = "Layout decomposition, Lithography, Double patterning, Triple patterning",
author = "Haitong Tian and Wong, \{Martin D. F.\}",
note = "Publisher Copyright: {\textcopyright} 2014 Springer Science+Business Media New York",
year = "2014",
month = dec,
day = "10",
doi = "10.1007/978-3-642-27848-8\_745-1",
language = "English",
pages = "1–5",
editor = "Ming-Yang Kao",
booktitle = "Encyclopedia of Algorithms",
publisher = "Springer",
edition = "Living",
}