Layout Decomposition for Multiple Patterning

Research output: Chapter in book/report/conference proceedingEntry for encyclopedia/dictionarypeer-review

Original languageEnglish
Title of host publicationEncyclopedia of Algorithms
EditorsMing-Yang Kao
PublisherSpringer New York
Pages1059-1062
Number of pages4
Edition2nd
ISBN (Electronic)9781493928644
ISBN (Print)9781493928637
DOIs
Publication statusPublished - 14 Mar 2016

User-Defined Keywords

  • Double patterning
  • Layout decomposition
  • Lithography
  • Triple patterning

Cite this