Layout Decomposition for Multiple Patterning

^*Corresponding author for this work

Research output: Chapter in book/report/conference proceeding › Chapter › peer-review

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@inbook{89b496710e6345338d7e4fe74dc5beca,

title = "Layout Decomposition for Multiple Patterning",

author = "Haitong Tian and Wong, {Martin D. F.}",

note = "Publisher Copyright: {\textcopyright} 2014 Springer Science+Business Media New York",

year = "2014",

month = dec,

day = "10",

doi = "10.1007/978-3-642-27848-8_745-1",

language = "English",

pages = "1–5",

editor = "Ming-Yang Kao",

booktitle = "Encyclopedia of Algorithms",

publisher = "Springer",

edition = "Living",

}

TY - CHAP

T1 - Layout Decomposition for Multiple Patterning

AU - Tian, Haitong

AU - Wong, Martin D. F.

PY - 2014/12/10

Y1 - 2014/12/10

U2 - 10.1007/978-3-642-27848-8_745-1

DO - 10.1007/978-3-642-27848-8_745-1

M3 - Chapter

SP - 1

EP - 5

BT - Encyclopedia of Algorithms

A2 - Kao, Ming-Yang

PB - Springer

CY - Berlin, Heidelberg

ER -