L2O-ILT: Learning to Optimize Inverse Lithography Techniques: Learning to Optimize Inverse Lithography Techniques

Binwu Zhu, Su Zheng, Ziyang Yu, Guojin Chen, Yuzhe Ma, Fan Yang, Bei Yu*, Martin D.F. Wong

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

2 Citations (Scopus)

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Keyphrases

Computer Science

Engineering

Chemical Engineering

Material Science