Is your layout density verification exact?: A fast exact algorithm for density calculation

Hua Xiang; Kai-Yuan Chao; Ruchir Puri; Martin D. F. Wong

doi:10.1145/1231996.1232003

Is your layout density verification exact? A fast exact algorithm for density calculation

Hua Xiang, Kai-Yuan Chao, Ruchir Puri, Martin D. F. Wong

Office of the Provost

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

9 Citations (Scopus)

Abstract

As the device shapes keep shrinking, the designs are more sensitive to manufacturing processes. In order to improve performance predictability and yield, mask layout uniformity/evenness is highly desired, and it is usually measured by the feature density with defined feasible range in manufacture process design rules. To address the density control problem, one fundamental problem is how to calculate density accurately and efficiently. In this paper, we propose a fast exact algorithm to identify the maximum density for a given layout. Compared with the existing exact algorithms, our algorithm reduces the running time from days/hours to a few minutes/seconds. And it is even faster than the existing approximate algorithms in literature.

Original language	English
Title of host publication	ISPD '07
Subtitle of host publication	Proceedings of the 2007 International Symposium on Physical Design
Publisher	Association for Computing Machinery (ACM)
Pages	19-26
Number of pages	8
ISBN (Print)	9781595936134
DOIs	https://doi.org/10.1145/1231996.1232003
Publication status	Published - 18 Mar 2007
Event	16th International Symposium on Physical Design, ISPD 2007 - Austin , United States Duration: 18 Mar 2007 → 21 Mar 2007 https://dl.acm.org/doi/proceedings/10.1145/1231996 (Conference proceedings)

Publication series

Name	Proceedings of the International Symposium on Physical Design, ISPD

Symposium

Symposium	16th International Symposium on Physical Design, ISPD 2007
Country/Territory	United States
City	Austin
Period	18/03/07 → 21/03/07
Internet address	https://dl.acm.org/doi/proceedings/10.1145/1231996 (Conference proceedings)

Scopus Subject Areas

Electrical and Electronic Engineering

User-Defined Keywords

Density
Fix-dissection
DFM

Access to Document

10.1145/1231996.1232003

Cite this

Xiang, H., Chao, K.-Y., Puri, R., & Wong, M. D. F. (2007). Is your layout density verification exact? A fast exact algorithm for density calculation. In ISPD '07: Proceedings of the 2007 International Symposium on Physical Design (pp. 19-26). (Proceedings of the International Symposium on Physical Design, ISPD). Association for Computing Machinery (ACM). https://doi.org/10.1145/1231996.1232003

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title = "Is your layout density verification exact?: A fast exact algorithm for density calculation",

abstract = "As the device shapes keep shrinking, the designs are more sensitive to manufacturing processes. In order to improve performance predictability and yield, mask layout uniformity/evenness is highly desired, and it is usually measured by the feature density with defined feasible range in manufacture process design rules. To address the density control problem, one fundamental problem is how to calculate density accurately and efficiently. In this paper, we propose a fast exact algorithm to identify the maximum density for a given layout. Compared with the existing exact algorithms, our algorithm reduces the running time from days/hours to a few minutes/seconds. And it is even faster than the existing approximate algorithms in literature.",

keywords = "Density, Fix-dissection, DFM",

author = "Hua Xiang and Kai-Yuan Chao and Ruchir Puri and Wong, {Martin D. F.}",

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Xiang, H, Chao, K-Y, Puri, R & Wong, MDF 2007, Is your layout density verification exact? A fast exact algorithm for density calculation. in ISPD '07: Proceedings of the 2007 International Symposium on Physical Design. Proceedings of the International Symposium on Physical Design, ISPD, Association for Computing Machinery (ACM), pp. 19-26, 16th International Symposium on Physical Design, ISPD 2007, Austin , Texas, United States, 18/03/07. https://doi.org/10.1145/1231996.1232003

Is your layout density verification exact? A fast exact algorithm for density calculation. / Xiang, Hua; Chao, Kai-Yuan; Puri, Ruchir et al.
ISPD '07: Proceedings of the 2007 International Symposium on Physical Design. Association for Computing Machinery (ACM), 2007. p. 19-26 (Proceedings of the International Symposium on Physical Design, ISPD).

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

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