Evaluation of cost-driven triple patterning lithography decomposition

Haitong Tian, Hongbo Zhang, Qiang Ma, Martin D.F. Wong

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review

7 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Evaluation of cost-driven triple patterning lithography decomposition'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science