CTM-SRAF: Continuous Transmission Mask-based Constraint-aware Sub Resolution Assist Feature Generation

Ziyang Yu*, Peiyu Liao, Yuzhe Ma, Bei Yu, Martin D.F. Wong

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

3 Citations (Scopus)

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Keyphrases

Engineering

Computer Science

Chemical Engineering