Coupling-aware mixed dummy metal insertion for lithography

Liang Deng, Martin D.F. Wong, Kai Yuan Chao, Hua Xiang

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review

3 Citations (Scopus)


Dive into the research topics of 'Coupling-aware mixed dummy metal insertion for lithography'. Together they form a unique fingerprint.


Physics & Astronomy

Engineering & Materials Science

Chemical Compounds