CMP aware shuttle mask floorplanning

Gang Xu; Ruiqi Tian; David Z. Pan; Martin D. F. Wong

doi:10.1145/1120725.1120836

CMP aware shuttle mask floorplanning

Gang Xu, Ruiqi Tian, David Z. Pan, Martin D. F. Wong

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Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

13 Citations (Scopus)

Abstract

By putting different chips on the same mask, shuttle mask (or multiple project wafer) provides an economical solution for low volume designs and design prototypes to share the rising mask cost. A challenging floorplanning problem is to optimally pack these chips according to objectives and constraints related to cost and manufacturability. In this paper, we study the problem of CMP aware shuttle mask floorplanning, which is formulated as a rectangle packing problem with objectives of area and post-CMP topography variation minimization. We propose a 3-step procedure to solve the problem. First, we use the low-pass filter oxide CMP model to guide the simulated annealing search to minimize the topography variation. The result is then further improved by sliding each chip in its enclosing rectangle. Finally, we calculate the optimal amount of dummy feature needed with a linear programming method. Our experiment shows excellent results on real industry data.

Original language	English
Title of host publication	ASP-DAC '05
Subtitle of host publication	Proceedings of the 2005 Asia and South Pacific Design Automation Conference
Place of Publication	United States
Publisher	Association for Computing Machinery (ACM)
Pages	1111-1114
Number of pages	4
ISBN (Electronic)	9780780387379
ISBN (Print)	0780387368, 9780780387362
DOIs	https://doi.org/10.1145/1120725.1120836
Publication status	Published - Jan 2005
Event	10th Asia and South Pacific Design Automation Conference, ASP-DAC 2005 - Hotel Equatorial, Shanghai, China Duration: 18 Jan 2005 → 21 Jan 2005 https://www.aspdac.com/aspdac2005/ (Conference website)

Publication series

Name	Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC

Conference

Conference	10th Asia and South Pacific Design Automation Conference, ASP-DAC 2005
Country/Territory	China
City	Shanghai
Period	18/01/05 → 21/01/05
Internet address	https://www.aspdac.com/aspdac2005/ (Conference website)

Access to Document

10.1145/1120725.1120836

Cite this

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title = "CMP aware shuttle mask floorplanning",

abstract = "By putting different chips on the same mask, shuttle mask (or multiple project wafer) provides an economical solution for low volume designs and design prototypes to share the rising mask cost. A challenging floorplanning problem is to optimally pack these chips according to objectives and constraints related to cost and manufacturability. In this paper, we study the problem of CMP aware shuttle mask floorplanning, which is formulated as a rectangle packing problem with objectives of area and post-CMP topography variation minimization. We propose a 3-step procedure to solve the problem. First, we use the low-pass filter oxide CMP model to guide the simulated annealing search to minimize the topography variation. The result is then further improved by sliding each chip in its enclosing rectangle. Finally, we calculate the optimal amount of dummy feature needed with a linear programming method. Our experiment shows excellent results on real industry data.",

author = "Gang Xu and Ruiqi Tian and Pan, {David Z.} and Wong, {Martin D. F.}",

note = "Funding information: This work was partially supported by the National Science Foundation under grant CCR-0306244 and IBM Faculty Award. We used computers donated by Intel Corporation. Publisher copyright: {\textcopyright} 2005 ACM; 10th Asia and South Pacific Design Automation Conference, ASP-DAC 2005 ; Conference date: 18-01-2005 Through 21-01-2005",

year = "2005",

month = jan,

doi = "10.1145/1120725.1120836",

language = "English",

isbn = "0780387368",

series = "Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC",

publisher = "Association for Computing Machinery (ACM)",

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Xu, G, Tian, R, Pan, DZ & Wong, MDF 2005, CMP aware shuttle mask floorplanning. in ASP-DAC '05: Proceedings of the 2005 Asia and South Pacific Design Automation Conference. Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC, Association for Computing Machinery (ACM), United States, pp. 1111-1114, 10th Asia and South Pacific Design Automation Conference, ASP-DAC 2005, Shanghai, China, 18/01/05. https://doi.org/10.1145/1120725.1120836

CMP aware shuttle mask floorplanning. / Xu, Gang; Tian, Ruiqi; Pan, David Z. et al.
ASP-DAC '05: Proceedings of the 2005 Asia and South Pacific Design Automation Conference. United States: Association for Computing Machinery (ACM), 2005. p. 1111-1114 (Proceedings of the Asia and South Pacific Design Automation Conference, ASP-DAC).

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

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AU - Pan, David Z.

AU - Wong, Martin D. F.

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CMP aware shuttle mask floorplanning

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