Abstract
Using experimental plasmon loss energy of a-Si the number of valence electrons per unit volume in amorphous silicon thin films is determined. The characteristics of hydrogen incorporation in silicon network is studied by a quantitative model assuming that the structure of a good quality a-Si:H thin film dominantly consists of Si-H and Si-Si bonds only. Using the concept of Penn gap and bond polarizability, we have derived an expression for the optical energy gap as a function of hydrogen concentration for a-Si:H thin films. The calculated results, thus, obtained agree very well with the experimental results.
| Original language | English |
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| Pages (from-to) | 4709-4711 |
| Number of pages | 3 |
| Journal | Journal of Applied Physics |
| Volume | 73 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 1 May 1993 |