Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

Weijie Song; S. K. So; Daoyuan Wang; Yong Qiu; Lili Cao

doi:10.1016/S0169-4332(01)00178-7

Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

Weijie Song
, S. K. So
, Daoyuan Wang
, Yong Qiu
, Lili Cao^*

^*Corresponding author for this work

Department of Physics

Research output: Contribution to journal › Journal article › peer-review

79 Citations (Scopus)

43 Downloads (Pure)

Abstract

The surface chemistry of ITO thin-films before and after UV-ozone treatment was characterized using angle dependent X-ray photoelectron spectroscopy (ADXPS). After solvent cleaning, the ITO surface was covered with a thin nonconducting carbon contamination layer of ∼7 Å. This contamination layer was removed efficiently by UV-ozone treatment, and the chemical states of the residual carbon at ITO surface after UV-ozone treatment were quite different from contaminated carbon. UV-ozone treatment modified ITO surface by introducing O ^2- ions into ITO surface. The modified depth was about 50 Å. The modification decreased the carrier concentration at ITO surface, and thus decreased the conductivity of ITO surface.

Original language	English
Pages (from-to)	158-164
Number of pages	7
Journal	Applied Surface Science
Volume	177
Issue number	3
DOIs	https://doi.org/10.1016/S0169-4332(01)00178-7
Publication status	Published - 8 Jun 2001

User-Defined Keywords

Angle dependent X-ray photoelectron spectroscopy
Indium tin oxide
UV-ozone treatment

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10.1016/S0169-4332(01)00178-7

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@article{a1e30695580f4e958fc63cd52be8f0ff,

title = "Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide",

abstract = " The surface chemistry of ITO thin-films before and after UV-ozone treatment was characterized using angle dependent X-ray photoelectron spectroscopy (ADXPS). After solvent cleaning, the ITO surface was covered with a thin nonconducting carbon contamination layer of ∼7 {\AA}. This contamination layer was removed efficiently by UV-ozone treatment, and the chemical states of the residual carbon at ITO surface after UV-ozone treatment were quite different from contaminated carbon. UV-ozone treatment modified ITO surface by introducing O 2- ions into ITO surface. The modified depth was about 50 {\AA}. The modification decreased the carrier concentration at ITO surface, and thus decreased the conductivity of ITO surface.",

keywords = "Angle dependent X-ray photoelectron spectroscopy, Indium tin oxide, UV-ozone treatment",

author = "Weijie Song and So, \{S. K.\} and Daoyuan Wang and Yong Qiu and Lili Cao",

note = "Funding Information: Support of this research by the Chinese National Science Foundation \#29875013 and Research Committee of Hong Kong Baptist University under Grant \#FRG/98-99/II-71 is gratefully acknowledged. We would like to thank Professor Ho Wei for helpful discussions.",

year = "2001",

month = jun,

day = "8",

doi = "10.1016/S0169-4332(01)00178-7",

language = "English",

volume = "177",

pages = "158--164",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

AU - Song, Weijie

AU - So, S. K.

AU - Wang, Daoyuan

AU - Qiu, Yong

AU - Cao, Lili

N1 - Funding Information: Support of this research by the Chinese National Science Foundation #29875013 and Research Committee of Hong Kong Baptist University under Grant #FRG/98-99/II-71 is gratefully acknowledged. We would like to thank Professor Ho Wei for helpful discussions.

PY - 2001/6/8

Y1 - 2001/6/8

N2 - The surface chemistry of ITO thin-films before and after UV-ozone treatment was characterized using angle dependent X-ray photoelectron spectroscopy (ADXPS). After solvent cleaning, the ITO surface was covered with a thin nonconducting carbon contamination layer of ∼7 Å. This contamination layer was removed efficiently by UV-ozone treatment, and the chemical states of the residual carbon at ITO surface after UV-ozone treatment were quite different from contaminated carbon. UV-ozone treatment modified ITO surface by introducing O 2- ions into ITO surface. The modified depth was about 50 Å. The modification decreased the carrier concentration at ITO surface, and thus decreased the conductivity of ITO surface.

AB - The surface chemistry of ITO thin-films before and after UV-ozone treatment was characterized using angle dependent X-ray photoelectron spectroscopy (ADXPS). After solvent cleaning, the ITO surface was covered with a thin nonconducting carbon contamination layer of ∼7 Å. This contamination layer was removed efficiently by UV-ozone treatment, and the chemical states of the residual carbon at ITO surface after UV-ozone treatment were quite different from contaminated carbon. UV-ozone treatment modified ITO surface by introducing O 2- ions into ITO surface. The modified depth was about 50 Å. The modification decreased the carrier concentration at ITO surface, and thus decreased the conductivity of ITO surface.

KW - Angle dependent X-ray photoelectron spectroscopy

KW - Indium tin oxide

KW - UV-ozone treatment

UR - https://www.scopus.com/pages/publications/0035827463

U2 - 10.1016/S0169-4332(01)00178-7

DO - 10.1016/S0169-4332(01)00178-7

M3 - Journal article

AN - SCOPUS:0035827463

SN - 0169-4332

VL - 177

SP - 158

EP - 164

JO - Applied Surface Science

JF - Applied Surface Science

IS - 3

ER -

Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

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