Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

Weijie Song, S. K. So, Daoyuan Wang, Yong Qiu, Lili Cao*

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

77 Citations (Scopus)
23 Downloads (Pure)


The surface chemistry of ITO thin-films before and after UV-ozone treatment was characterized using angle dependent X-ray photoelectron spectroscopy (ADXPS). After solvent cleaning, the ITO surface was covered with a thin nonconducting carbon contamination layer of ∼7 Å. This contamination layer was removed efficiently by UV-ozone treatment, and the chemical states of the residual carbon at ITO surface after UV-ozone treatment were quite different from contaminated carbon. UV-ozone treatment modified ITO surface by introducing O 2- ions into ITO surface. The modified depth was about 50 Å. The modification decreased the carrier concentration at ITO surface, and thus decreased the conductivity of ITO surface.

Original languageEnglish
Pages (from-to)158-164
Number of pages7
JournalApplied Surface Science
Issue number3
Publication statusPublished - 8 Jun 2001

Scopus Subject Areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Physics and Astronomy(all)
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

User-Defined Keywords

  • Angle dependent X-ray photoelectron spectroscopy
  • Indium tin oxide
  • UV-ozone treatment


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