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AdaOPC: A self-adaptive mask optimization framework for real design patterns

  • Wenqian Zhao
  • , Xufeng Yao
  • , Ziyang Yu
  • , Guojin Chen
  • , Yuzhe Ma
  • , Bei Yu
  • , Martin D. F. Wong

Research output: Chapter in book/report/conference proceeding › Conference proceeding › peer-review

19 Citations (Scopus)

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