AdaOPC: A self-adaptive mask optimization framework for real design patterns

Wenqian Zhao, Xufeng Yao, Ziyang Yu, Guojin Chen, Yuzhe Ma, Bei Yu, Martin D. F. Wong

Research output: Chapter in book/report/conference proceedingConference proceedingpeer-review

11 Citations (Scopus)

Fingerprint

Dive into the research topics of 'AdaOPC: A self-adaptive mask optimization framework for real design patterns'. Together they form a unique fingerprint.

Keyphrases

Computer Science

Engineering

Chemical Engineering