@article{3b9ff3b6efa1435794520cca6109aad5,
title = "A Robust Computational Algorithm for Inverse Photomask Synthesis in Optical Projection Lithography",
abstract = "Inverse lithography technology formulates the photomask synthesis as an inverse mathematical problem. To solve this, we propose a variational functional and develop a robust computational algorithm, where the proposed functional takes into account the process variations and incorporates several regularization terms that can control the mask complexity. We establish the existence of the minimizer of the functional, and in order to optimize it effectively, we adopt an alternating minimization procedure with Chambolle's fast duality projection algorithm. Experimental results show that our proposed algorithm is effective in synthesizing high quality photomasks as compared with existing methods.",
keywords = "Image synthesis, Inverse lithography, Total variation",
author = "Choy, {Siu Kai} and Ningning Jia and Tong, {Chong Sze} and Tang, {Man Lai} and Lam, {Edmund Y.}",
note = "Funding information: Imaging Systems Laboratory, Department of Electrical and Electronic Engineering, The University of Hong Kong, Pokfulam Road, Hong Kong (
[email protected],
[email protected]). The research of these authors was supported in part by the University Research Committee of the University of Hong Kong under project 10400898, by the Research Grants Council of the Hong Kong Special Administrative Region, China, under projects HKU 7134/08E, and by the UGC Areas of Excellence project Theory, Modeling, and Simulation of Emerging Electronics. Department of Mathematics, Hong Kong Baptist University, Kowloon Tong, Hong Kong (
[email protected],
[email protected]). The research of these authors was supported by the RGC GRF under grants HKBU202108, HKBU261007, and HKBU261508. Publisher copyright: Copyright {\textcopyright} 2012 Society for Industrial and Applied Mathematics",
year = "2012",
month = may,
day = "17",
doi = "10.1137/110830356",
language = "English",
volume = "5",
pages = "625--651",
journal = "SIAM Journal on Imaging Sciences",
issn = "1936-4954",
publisher = "Society for Industrial and Applied Mathematics (SIAM)",
number = "2",
}