A polymeric master replication technology for mass fabrication of poly(dimethylsiloxane) microfluidic devices

Hai Fang Li, Jin Ming Lin*, Rong Guo Su, Zongwei CAI, Katsumi Uchiyama

*Corresponding author for this work

Research output: Contribution to journalJournal articlepeer-review

13 Citations (Scopus)


A protocol of producing multiple polymeric masters from an original glass master mold has been developed, which enables the production of multiple poly(dimethylsiloxane) (PDMS)-based microfluidic devices in a low-cost and efficient manner. Standard wet-etching techniques were used to fabricate an original glass master with negative features, from which more than 50 polymethylmethacrylate (PMMA) positive replica masters were rapidly created using the thermal printing technique. The time to replicate each PMMA master was as short as 20 min. The PMMA replica masters have excellent structural features and could be used to cast PDMS devices for many times. An integration geometry designed for laser-induced fluorescence (LIF) detection, which contains normal deep microfluidic channels and a much deeper optical fiber channel, was successfully transferred into PDMS devices. The positive relief on seven PMMA replica masters is replicated with regard to the negative original glass master, with a depth average variation of 0.89% for 26 μm deep microfluidic channels and 1.16% for the 90 μm deep fiber channel. The imprinted positive relief in PMMA from master-to-master is reproducible with relative standard deviations (RSDs) of 1.06% for the maximum width and 0.46% for depth in terms of the separation channel. The PDMS devices fabricated from the PMMA replica masters were characterized and applied to the separation of a fluorescein isothiocyanate (FITC)-labeled epinephrine sample.

Original languageEnglish
Pages (from-to)1825-1833
Number of pages9
Issue number9
Publication statusPublished - May 2005

Scopus Subject Areas

  • Biochemistry
  • Clinical Biochemistry

User-Defined Keywords

  • Microfluidic device
  • Miniaturization
  • Poly(dimethylsiloxane)
  • Thermal printing
  • Wet-etch


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