Abstract
Pulsed discharge of nitrogen was applied in the laser ablation synthesis of. aluminum nitride powder to provide more atomic nitrogen. Very high concentration of aluminum nitride was then achieved. The nitrogen discharge plasma was studied by optical emission spectroscopy. Temporal behaviors of the emissions from various species were observed and discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 953-956 |
| Number of pages | 4 |
| Journal | Chinese Physics Letters |
| Volume | 14 |
| Issue number | 12 |
| DOIs | |
| Publication status | Published - Dec 1997 |
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