A novel application of the pulsed nitrogen discharge in the synthesis of aluminum nitride powder by laser ablation

Pei Nan Wang, Pan Qi, Nai Ho CHEUNG, Chen Shu-Chi

Research output: Contribution to journalJournal articlepeer-review

4 Citations (Scopus)

Abstract

Pulsed discharge of nitrogen was applied in the laser ablation synthesis of. aluminum nitride powder to provide more atomic nitrogen. Very high concentration of aluminum nitride was then achieved. The nitrogen discharge plasma was studied by optical emission spectroscopy. Temporal behaviors of the emissions from various species were observed and discussed.

Original languageEnglish
Pages (from-to)953-956
Number of pages4
JournalChinese Physics Letters
Volume14
Issue number12
DOIs
Publication statusPublished - 1997

Scopus Subject Areas

  • Physics and Astronomy(all)

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